中古装置情報

中古部品一覧

管理No. Maker P/N New/Used Parts Name Qty
S02629 AMAT 0010-20331 Used ASSY DUAL DRIVER (Dual Degas Driver) 1
S02630 KOLLMORGEN 1100-0051-00 Used マグネットドライバー 6
S02634 AMAT 0040-09723 Used UNIBODY, ETCH CHAMBER WITH .397 STEP (チャンバー) 1
S02635 AMAT 0040-09893 Used CHAMBER BODY,R2,EDGES GAS FEED (チャンバー) 2
S02636 AMAT 0040-09002 Used CHAMBER, ETCH (チャンバー) 1
S02648   20800-186 Used エクステンションボード 1
S02651 AMAT 0010-09337 Used LAMP MODULE ASSY,200MM (200MM LAMP  MODULE) 3
S02652 AMAT 0010-09911 Used ASP,LAMP MODULE ASSY, 1000W (MODULE MFG) 1
S02660 AMAT 0100-00003 Used VME STEPPER CONTROLLER I (STEPPER DRIVE) 21
S02661 AMAT 0100-76124 Used DIGITAL I/O BOARD 8
S02662 AMAT 0100-11002 Used PCB ASSEMBLY DIGITAL I/O (DIGITAL I/O CARD) 18
S02663 AMAT 0100-09054 Used PCB ASSY, ANALOG INPUT (ANALOG INPUT BOARD) 6
S02664 AMAT 0100-11001 Used ANALOG OUTPUT BOARD 5
S02665 AMAT 0100-20001 Used SYSTEM ELECTRONICS INTERFACE BD 4
S02666 AMAT 0190-70102 Used VGA VIDEO CONTOROLLER 1
S02667 AMAT 0100-11022 Used SYS FEIL PCB 1
S02668 AMAT 0100-20100 Used ANALOG INPUT/OUTPUT 5
S02669 AMAT 0190-35791 Used SERIPLEX PCB 1
S02670 AMAT 0100-09002 Used P5000 CPU 4
S02671 AMAT 0100-09003 Used VIDEO BORD 2
S02672 AMAT 0100-00014 Used OPTO DETECT 6
S02673 AMAT 0100-09011 Used PCB ASSY AI MUX (AI MUX/CURRENT SENSE) 5
S02674 AMAT 0100-09009 Used BUFFER I/O 5
S02675 AMAT 0100-00011 Used PCB ASSEMBLY CHOPPER DRIVE I (CHOPPER DRIVE PWB) 1
S02678 AMAT 0100-00008 Used PCB ASSEMBLY T.C. GAUGE MONITOR (TC GAUGE PWB) 5
S02679 AMAT 0100-35058 Used ASSY PCB, LOADLOCK INTERLOCKS (LOADLOCK INTERLOCKS ) 1
S02680 AMAT 0100-20012 Used SHFPCB ASSY, ISOLATION AMPLIFIER (ISOLATION AMPLIFIER BD) 1
S02681 AMAT 0100-35054 Used PCB ASSY,CHMBR INTERFACE (CHAMBER INTERFACE BD) 3
S02682 AMAT 0100-20063 Used TC GAUGE BD 1
S02683 AMAT 0090-35723 Used PCB ASSY CENTERFINDER SBC FOR MC-ROBOT (INTELLIGENT INTERFACE) 1
S02684 AMAT 0100-09196 Used E_CHUCK CONTROLLER 1
S02685 AMAT 0100-09034 Used LIQUID SOURCE INTERFACE BD 3
S02686 AMAT 0100-09136 Used ASSY DRAWING MINI DI/DO SHORT CIRCUIT PR (MINI DI/DO SHORT CIRCUIT PROTECTED BD) 2
S02687 AMAT 0100-09022 Used MINI AI/AO BD 2
S02688 AMAT 0100-09006 Used PCB ASSY, INTELLIGENT INTERFACE SBC (INTELLIGENT INTERFACE) 1
S02690 AMAT 0190-75073 Used BALL SCREW ASSY, LEFT HAND, SPEC (ヒーター水平出し冶具 ) 1
S02708 AMAT 0010-09035 Used ASSY BWCVD THROTTLE VALVE 100,125 &150MM (ASSY BWCVD THROTTLE VALVE) 2
S02711 AMAT 0010-09933 Used HV MODULE ASSY, ESC (HV MODULE ESC) 2
S02712 AMAT 0010-09917 Used ASSY, ENDPOINT DETECTOR SENSOR HEAD (EPT DETECTER SENS HEA PRECISION 5000) 1
S02722 AMAT 0010-70321 Used ASSY, SLIT VALVE KALREZ O-RING, CROWNED (SLIT VALVE HYBRID) 3
S02723 AMAT 0010-70162 Used ASSY,ACTUATOR SLIT VALVE (ASSY.ACTUATOR SLIT VALE) 1
S02724 AMAT 0010-09022 Used SLIT VALVE  2
S02730 AMAT 0010-20524 Used  MODIFIED  8" RF MATCH (PVD RF MATCH 8"200mm) 1
S02734 AMAT 0010-09416 Used ETCH RF MATCH 1
S02735 AMAT 0010-09750 Used CVD RF MATCH (DC BIAS) 2
S02736 AMAT 0010-09750DR Used RF MATCH CVD 1
S02737 AMAT 0010-09490 Used Tungsten Match 1
S02741 ADTEC 0190-55019 Used RF Plasma Generator 3
S02743 EMI 0190-70080 Used RF GENERATOR 2
S02744 EMI 0190-76048 Used PLASMA GENERATOR 1
S02745 EBARA A30W Used DRY PUMP 1
S02746 EBARA A10S Used DRY PUMP 1
S02747 EBARA AA20N Used DRY PUMP 1
S02748 AMAT 0010-09063 Used SUSCEPTOR CALIBRATION DISPLAY 1
S02749 Kyosan RFK30-ST1 Used RF GENERATOR 1