中古装置情報

中古装置一覧

Equipment Manufacture Model Vintage Wafer Serial No. Configuration Notes
PVD CANON ANELVA COSMOS I-1201PVD 2002 12 37888-1 PVD for Bump
RTP AG Associates Heatpulse 8108 1995 8 1K95146 RTP
CVD Novellus Concept-1-200-W 1995 8 95-25-1020 W-CVD
CVD Novellus Concept-1-200-W 1995 8 2042 W-CVD
ETCH TEL Unity VerⅡ 845DD 1996 8 KLZ347 Oxide Etch/ DRM chamber
ETCH TEL Unity 2e-844DD 1998 8 U01000 Oxide Etch/ DRM chamber
CVD AMAT P5000 1993 200 5870 DXL Delta TEOS x2ch 8slot,Ver3 HOT Box
CVD AMAT P5000 1992 200 5783 DXL Delta TEOS x2ch 8slot,Ver3 HOT Box
ETCH AMAT P5000 1995 200 6825 Mxp+ Poly Polymide ESC x2ch 29slot,Orient
CVD AMAT P5000 150 5787 DLH SiH4 x3ch 8slot
CVD AMAT P5000 150 3125 DxL TEOS x3ch 8slot,Injection type
ETCH AMAT P5000 150 4277 MarkⅡ WEB x2ch 8slot,Some missing
Metrology KLA OP-2600 1996 200 6313 Thinkness Measurment