中古装置情報

中古装置一覧

Equipment Manufacture Model Vintage Wafer Serial No. Configuration Notes
PVD CANON ANELVA COSMOS I-1201PVD 2002 12 37888-1 PVD for Bump
RTP AG Associates Heatpulse 8108 1995 8 1K95146 RTP
CVD Novellus Concept-1-200-W 1995 8 95-25-1020 W-CVD
CVD Novellus Concept-1-200-W 1995 8 2042 W-CVD
ETCH TEL Unity VerⅡ 845DD 1996 8 KLZ347 Oxide Etch/ DRM chamber
ETCH TEL Unity 2e-844DD 1998 8 U01000 Oxide Etch/ DRM chamber
CVD AMAT P5000 1995 150 4585 DxL BPSG SACVD x3ch PLIS gas box
CVD AMAT P5000 1993 200 5870 DXL Delta TEOS x2ch Ver4 HOT Box
CVD AMAT P5000 1992 200 5783 DXL Delta TEOS x2ch Ver4 HOT Box
CVD AMAT P5000 1992 200 5757 DXL Delta TEOS x2ch Ver4 HOT Box
CVD AMAT P5000 200 Poly Etch x3ch
Metrology KLA SFS-6200 1994 200 0294-284 Defect Measurment
Metrology KLA OP-2600 1996 200 6423-1296 Thinkness Measurment
Furnace TEL INDYPLUS 300 S00001055154 ALD
Furnace TEL INDYPLUS 300 S00001045074 ALD
Furnace TEL INDYPLUS 300 S00001055114 ALD
Furnace TEL INDYPLUS 300 S00001065159 ALD
Furnace TEL INDYPLUS 300 S000010Y5444 ALD
Furnace KOKUSAI DJ-1223 VN-DF 300 T2DC6-15543-1 ALD NITRIDE CX-5000
Furnace KOKUSAI DJ-1223 VN-DF 300 2DC6-14902 TiN CX-5000
Furnace KOKUSAI DJ-1223 VN-DF 300 2DC6-14761 TiN CX-5000
Furnace KOKUSAI DJ-1223 VN-DF 300 T2DC6-14436 TiN CX-5000
Furnace KOKUSAI DJ-1223 VN-DF 300 T2DC6-14285 TiN CX-5000
Furnace KOKUSAI DJ-1223 VN-DF 300 T2DC6-14289 TiN CX-5000
Furnace KOKUSAI DJ-1223 VN-DF 300 T2DC6-14284 TiN CX-5000
Furnace KOKUSAI DJ-1223 VN-DF 300 T2DC6-14094-1 TiN CX-5000
Furnace KOKUSAI DJ-1223 VN-DF 300 T2DC6-14508-1 TiN CX-5000
Furnace KOKUSAI DJ-1223 VN-DF 300 T2DC6-14509-1 TiN CX-5000
Furnace KOKUSAI DJ-1223 VN-DF 300 T2DC6-14441-1 TiN CX-5000
Furnace KOKUSAI DJ-1223 VN-DF 300 T2DC6-14901-1 TiN CX-5000
Furnace KOKUSAI DJ-1223 VN-DF 300 T2DC6-14510-1 TiN CX-5000
Furnace KOKUSAI DJ-1223 VN-DF 300 T2DC6-14215-1 TiN CX-5000
Furnace KOKUSAI DJ-1223 VN-DF 300 T2DC6-14562-1 TiN CX-5000
Furnace KOKUSAI DJ-1223 VN-DF 300 T2DC6-14240-1 TiN CX-5000
Furnace KOKUSAI DJ-1223 VN-DF 300 T2DC6-14274-1 TiN CX-5000
Furnace KOKUSAI DJ-1223 VN-DF T2DC6-14563-1 TiN CX-5000