中古装置情報
Concept-One 200 W 1996 Model S/N：96-07-2080
構成 / System Configuration
● Software Ver,4.433
● Computer P166
● STD One Arm Robot
● Non-Contact Pin Search
● DC Quad / 24V / 90V Power Supply output
● Microcontamination Package
● STD Gate Valve & Throttle Valve
● External Foreline
● LCD Back Side monitor ※Touch SCREEN →None
● Dual Window
● Single Frequensy 【HF】 ENI OEM-28B
● RF Network TRAZAR MATCH
● New Generation Terminal Panel : 02-032615-00 Rev.k
● New Generation GAS Panel
● New Generation Main AC BOX & Remote AC Box
● TRANSFORMER → None
AMAT P5000CVD 6インチ 2ch TEOS（PLIS） S/N：CA5100 1988y（1995yリファビッシュ品）
構成 / System Configuration
● P5000CVD 150mm 2ch TEOS(PLIS) S/N:CA5100
● Ch-A Chamber type : TEOS(PLIS)
● Ch-B Chamber type : TEOS(PLIS)
● VME Type : 20slot
● CPU Type : Synergy V21
● VIDEO Board type : VGA
● FDD type : 3.5インチ
● Software Version : B4.26A_1
● Robot type : PhaseⅢ
● Cassette type : Top clamp
● Sto. Erevator type : 8slot
● I/O Sensor : 有
● H/E type : AMAT-0
● RF Gen type : ENI OEM12B × 2
● RF Match Type : P/N:0010-09750 ×2
● Throttle Valve type : P/N:0010-09301 ×2
● マノメーターType : MKS 122BA-00100BB-S 100Torr
● ISO valve Type : NW-40
● TC Guage Type : 1/4"VCR type
● Gas Panel Type : 28Gas Line (CES PLIS仕様)
● ミニコン : 有
● Δ-Yトランス : 有
AMAT Centura SOLD OUT.
