| 管理No. |
Maker |
P/N |
New/Used |
Parts Name |
Qty |
| S02629 |
AMAT |
0010-20331 |
Used |
ASSY DUAL DRIVER (Dual Degas Driver) |
1 |
| S02630 |
KOLLMORGEN |
1100-0051-00 |
Used |
マグネットドライバー |
6 |
| S02634 |
AMAT |
0040-09723 |
Used |
UNIBODY, ETCH CHAMBER WITH .397 STEP (チャンバー) |
1 |
| S02635 |
AMAT |
0040-09893 |
Used |
CHAMBER BODY,R2,EDGES GAS FEED (チャンバー) |
2 |
| S02636 |
AMAT |
0040-09002 |
Used |
CHAMBER, ETCH (チャンバー) |
1 |
| S02648 |
|
20800-186 |
Used |
エクステンションボード |
1 |
| S02660 |
AMAT |
0100-00003 |
Used |
VME STEPPER CONTROLLER I (STEPPER DRIVE) |
21 |
| S02661 |
AMAT |
0100-76124 |
Used |
DIGITAL I/O BOARD |
8 |
| S02662 |
AMAT |
0100-11002 |
Used |
PCB ASSEMBLY DIGITAL I/O (DIGITAL I/O CARD) |
18 |
| S02663 |
AMAT |
0100-09054 |
Used |
PCB ASSY, ANALOG INPUT (ANALOG INPUT BOARD) |
6 |
| S02664 |
AMAT |
0100-11001 |
Used |
ANALOG OUTPUT BOARD |
5 |
| S02665 |
AMAT |
0100-20001 |
Used |
SYSTEM ELECTRONICS INTERFACE BD |
4 |
| S02666 |
AMAT |
0190-70102 |
Used |
VGA VIDEO CONTOROLLER |
1 |
| S02667 |
AMAT |
0100-11022 |
Used |
SYS FEIL PCB |
1 |
| S02668 |
AMAT |
0100-20100 |
Used |
ANALOG INPUT/OUTPUT |
5 |
| S02669 |
AMAT |
0190-35791 |
Used |
SERIPLEX PCB |
1 |
| S02670 |
AMAT |
0100-09002 |
Used |
P5000 CPU |
4 |
| S02671 |
AMAT |
0100-09003 |
Used |
VIDEO BORD |
2 |
| S02672 |
AMAT |
0100-00014 |
Used |
OPTO DETECT |
6 |
| S02673 |
AMAT |
0100-09011 |
Used |
PCB ASSY AI MUX (AI MUX/CURRENT SENSE) |
5 |
| S02674 |
AMAT |
0100-09009 |
Used |
BUFFER I/O |
5 |
| S02675 |
AMAT |
0100-00011 |
Used |
PCB ASSEMBLY CHOPPER DRIVE I (CHOPPER DRIVE PWB) |
1 |
| S02678 |
AMAT |
0100-00008 |
Used |
PCB ASSEMBLY T.C. GAUGE MONITOR (TC GAUGE PWB) |
5 |
| S02679 |
AMAT |
0100-35058 |
Used |
ASSY PCB, LOADLOCK INTERLOCKS (LOADLOCK INTERLOCKS ) |
1 |
| S02680 |
AMAT |
0100-20012 |
Used |
SHFPCB ASSY, ISOLATION AMPLIFIER (ISOLATION AMPLIFIER BD) |
1 |
| S02681 |
AMAT |
0100-35054 |
Used |
PCB ASSY,CHMBR INTERFACE (CHAMBER INTERFACE BD) |
3 |
| S02682 |
AMAT |
0100-20063 |
Used |
TC GAUGE BD |
1 |
| S02683 |
AMAT |
0090-35723 |
Used |
PCB ASSY CENTERFINDER SBC FOR MC-ROBOT (INTELLIGENT INTERFACE) |
1 |
| S02684 |
AMAT |
0100-09196 |
Used |
E_CHUCK CONTROLLER |
1 |
| S02685 |
AMAT |
0100-09034 |
Used |
ＬＩＱＵＩＤ SOURCE INTERFACE BD |
3 |
| S02686 |
AMAT |
0100-09136 |
Used |
ASSY DRAWING MINI DI/DO SHORT CIRCUIT PR (MINI DI/DO SHORT CIRCUIT PROTECTED BD) |
2 |
| S02687 |
AMAT |
0100-09022 |
Used |
MINI AI/AO BD |
2 |
| S02688 |
AMAT |
0100-09006 |
Used |
PCB ASSY, INTELLIGENT INTERFACE SBC (INTELLIGENT INTERFACE) |
1 |
| S02690 |
AMAT |
0190-75073 |
Used |
BALL SCREW ASSY, LEFT HAND, SPEC (ヒーター水平出し冶具 ) |
1 |
| S02708 |
AMAT |
0010-09035 |
Used |
ASSY BWCVD THROTTLE VALVE 100,125 &150MM (ASSY BWCVD THROTTLE VALVE) |
2 |
| S02711 |
AMAT |
0010-09933 |
Used |
HV MODULE ASSY, ESC (HV MODULE ESC) |
2 |
| S02712 |
AMAT |
0010-09917 |
Used |
ASSY, ENDPOINT DETECTOR SENSOR HEAD (EPT DETECTER SENS HEA PRECISION 5000) |
1 |
| S02722 |
AMAT |
0010-70321 |
Used |
ASSY, SLIT VALVE KALREZ O-RING, CROWNED (SLIT VALVE HYBRID) |
3 |
| S02723 |
AMAT |
0010-70162 |
Used |
ASSY,ACTUATOR SLIT VALVE (ASSY.ACTUATOR SLIT VALE) |
1 |
| S02724 |
AMAT |
0010-09022 |
Used |
SLIT VALVE |
2 |
| S02730 |
AMAT |
0010-20524 |
Used |
MODIFIED 8" RF MATCH (PVD RF MATCH 8"200mm) |
1 |
| S02734 |
AMAT |
0010-09416 |
Used |
ETCH RF MATCH |
1 |
| S02735 |
AMAT |
0010-09750 |
Used |
CVD RF MATCH (DC BIAS) |
2 |
| S02736 |
AMAT |
0010-09750DR |
Used |
RF MATCH CVD |
1 |
| S02737 |
AMAT |
0010-09490 |
Used |
Tungsten Match |
1 |
| S02741 |
ADTEC |
0190-55019 |
Used |
RF Plasma Generator |
3 |
| S02743 |
EMI |
0190-70080 |
Used |
RF GENERATOR |
2 |
| S02744 |
EMI |
0190-76048 |
Used |
PLASMA GENERATOR |
1 |
| S02745 |
EBARA |
A30W |
Used |
DRY PUMP |
1 |
| S02746 |
EBARA |
A10S |
Used |
DRY PUMP |
1 |
| S02747 |
EBARA |
AA20N |
Used |
DRY PUMP |
1 |
| S02748 |
AMAT |
0010-09063 |
Used |
SUSCEPTOR CALIBRATION DISPLAY |
1 |
| S02749 |
Kyosan |
RFK30-ST1 |
Used |
RF GENERATOR |
1 |