中古装置情報

中古装置一覧

Equipment Manufacture Model Vintage Wafer Serial No. Configuration Notes
PVD CANON ANELVA COSMOS I-1201PVD 2002 12 37888-1 PVD for Bump
RTP AG Associates Heatpulse 8108 1995 8 1K95146 RTP
CVD Novellus Concept-1-200-W 1995 8 95-25-1020 W-CVD
CVD Novellus Concept-1-200-W 1995 8 2042 W-CVD
ETCH TEL Unity VerⅡ 845DD 1996 8 KLZ347 Oxide Etch/ DRM chamber
ETCH TEL Unity 2e-844DD 1998 8 U01000 Oxide Etch/ DRM chamber
CVD AMAT P5000 1993 200 5870 DXL Delta TEOS x2ch 8slot,Ver3 HOT Box
CVD AMAT P5000 1992 200 5783 DXL Delta TEOS x2ch 8slot,Ver3 HOT Box
ETCH AMAT P5000 1995 200 6825 Mxp+ Poly Polymide ESC x2ch 29slot,Orient
CVD AMAT P5000 150 5787 DLH SiH4 x3ch 8slot
CVD AMAT P5000 150 3125 DxL TEOS x3ch 8slot,Injection type
ETCH AMAT P5000 150 4277 MarkⅡ WEB x2ch 8slot,Some missing
Metrology KLA OP-2600 1996 200 6313 Thinkness Measurment

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中古部品一覧

管理No. Maker P/N New/Used Parts Name Qty
S02629 AMAT 0010-20331 Used ASSY DUAL DRIVER (Dual Degas Driver) 1
S02630 KOLLMORGEN 1100-0051-00 Used マグネットドライバー 6
S02634 AMAT 0040-09723 Used UNIBODY, ETCH CHAMBER WITH .397 STEP (チャンバー) 1
S02635 AMAT 0040-09893 Used CHAMBER BODY,R2,EDGES GAS FEED (チャンバー) 2
S02636 AMAT 0040-09002 Used CHAMBER, ETCH (チャンバー) 1
S02648 　 20800-186 Used エクステンションボード 1
S02660 AMAT 0100-00003 Used VME STEPPER CONTROLLER I (STEPPER　DRIVE) 21
S02661 AMAT 0100-76124 Used DIGITAL I/O BOARD 8
S02662 AMAT 0100-11002 Used PCB ASSEMBLY DIGITAL I/O (DIGITAL I/O CARD) 18
S02663 AMAT 0100-09054 Used PCB ASSY, ANALOG INPUT (ANALOG INPUT BOARD) 6
S02664 AMAT 0100-11001 Used ANALOG OUTPUT BOARD 5
S02665 AMAT 0100-20001 Used SYSTEM ELECTRONICS INTERFACE BD 4
S02666 AMAT 0190-70102 Used VGA VIDEO CONTOROLLER 1
S02667 AMAT 0100-11022 Used SYS FEIL PCB 1
S02668 AMAT 0100-20100 Used ANALOG INPUT/OUTPUT 5
S02669 AMAT 0190-35791 Used SERIPLEX　PCB 1
S02670 AMAT 0100-09002 Used P5000 CPU 4
S02671 AMAT 0100-09003 Used VIDEO BORD 2
S02672 AMAT 0100-00014 Used OPTO DETECT 6
S02673 AMAT 0100-09011 Used PCB ASSY AI MUX (AI MUX/CURRENT SENSE) 5
S02674 AMAT 0100-09009 Used BUFFER I/O 5
S02675 AMAT 0100-00011 Used PCB ASSEMBLY CHOPPER DRIVE I (CHOPPER DRIVE PWB) 1
S02678 AMAT 0100-00008 Used PCB ASSEMBLY T.C. GAUGE MONITOR (TC GAUGE PWB) 5
S02679 AMAT 0100-35058 Used ASSY PCB, LOADLOCK INTERLOCKS (LOADLOCK INTERLOCKS ) 1
S02680 AMAT 0100-20012 Used SHFPCB ASSY, ISOLATION AMPLIFIER (ISOLATION AMPLIFIER BD) 1
S02681 AMAT 0100-35054 Used PCB ASSY,CHMBR INTERFACE (CHAMBER INTERFACE BD) 3
S02682 AMAT 0100-20063 Used TC GAUGE BD 1
S02683 AMAT 0090-35723 Used PCB ASSY CENTERFINDER SBC FOR MC-ROBOT (INTELLIGENT INTERFACE) 1
S02684 AMAT 0100-09196 Used E_CHUCK CONTROLLER 1
S02685 AMAT 0100-09034 Used ＬＩＱＵＩＤ SOURCE INTERFACE BD 3
S02686 AMAT 0100-09136 Used ASSY DRAWING MINI DI/DO SHORT CIRCUIT PR (MINI DI/DO SHORT CIRCUIT PROTECTED BD) 2
S02687 AMAT 0100-09022 Used MINI AI/AO BD 2
S02688 AMAT 0100-09006 Used PCB ASSY, INTELLIGENT INTERFACE SBC (INTELLIGENT INTERFACE) 1
S02690 AMAT 0190-75073 Used BALL SCREW ASSY, LEFT HAND, SPEC (ヒーター水平出し冶具 ) 1
S02708 AMAT 0010-09035 Used ASSY BWCVD THROTTLE VALVE 100,125 &150MM (ASSY BWCVD THROTTLE VALVE) 2
S02711 AMAT 0010-09933 Used HV MODULE ASSY, ESC (HV MODULE ESC) 2
S02712 AMAT 0010-09917 Used ASSY, ENDPOINT DETECTOR SENSOR HEAD (EPT DETECTER SENS HEA PRECISION 5000) 1
S02722 AMAT 0010-70321 Used ASSY, SLIT VALVE KALREZ O-RING, CROWNED (SLIT VALVE HYBRID) 3
S02723 AMAT 0010-70162 Used ASSY,ACTUATOR SLIT VALVE (ASSY.ACTUATOR SLIT VALE) 1
S02724 AMAT 0010-09022 Used SLIT VALVE  2
S02730 AMAT 0010-20524 Used  MODIFIED  8" RF MATCH (PVD RF MATCH 8"200mm) 1
S02734 AMAT 0010-09416 Used ETCH RF MATCH 1
S02735 AMAT 0010-09750 Used CVD RF MATCH (DC BIAS) 2
S02736 AMAT 0010-09750DR Used RF MATCH CVD 1
S02737 AMAT 0010-09490 Used Tungsten Match 1
S02741 ADTEC 0190-55019 Used RF Plasma Generator 3
S02743 EMI 0190-70080 Used RF GENERATOR 2
S02744 EMI 0190-76048 Used PLASMA GENERATOR 1
S02745 EBARA A30W Used DRY PUMP 1
S02746 EBARA A10S Used DRY PUMP 1
S02747 EBARA AA20N Used DRY PUMP 1
S02748 AMAT 0010-09063 Used SUSCEPTOR CALIBRATION DISPLAY 1
S02749 ENI OEM-12B-07 Used RF GENERATOR S/N:12825 Checkd condition 1
S02750 ENI OEM-12B-07 Used RF GENERATOR S/N:12080 Checkd condition 1
S02751 ENI OEM-12B-07 Used RF GENERATOR S/N:12830 Checkd condition 1
S02752 ENI OEM-12B-07 Used RF GENERATOR S/N:6196 Checkd condition 1

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